Mechanical properties of ceramic matrix composites are highly dependent on the microstructure and homogeneity of the interphase. This study examined the influence of process factors, such as deposition temperature, propylene partial pressure, retention time, and hydrogen partial pressure, on the microstructure and homogeneity of PyC interphase deposited on the surface of carbon fiber cloth. Various characterization techniques were used to characterize the microstructure and texture of the PyC interphase, and the inherent correlation between microstructure, uniformity, and process parameters was analyzed. The results show that increasing temperature and propylene partial pressure lead to a more regular texture in the interphase, while decreasing hydrogen partial pressure has the opposite effect, and retention time has little effects. Additionally, an increase in deposition temperature and propylene partial pressure leads to an uneven distribution of interphase thickness, and overhigh propylene partial pressure directly leads to the production of carbon black. Increasing retention time helps to improve interphase homogeneity. The interphase uniformity of medium and high textures firstly drops and then increases when the hydrogen partial pressure increases, but the interphase uniformity of low texture is less impacted. Ultimately, the study clarified the growth method of the PyC interphase. Furthermore, the research delved into the process factors influencing the texture and uniformity of the PyC interphase, which provided a basis for the fine regulation of PyC interface phase in the future.