Advanced Design of Block Copolymers for Nanolithography

Chen Leilei, Tao Yongxin, Hu Xin, Feng Hongbo, Zhu Ning, Guo Kai

Prog Chem ›› 2023, Vol. 35 ›› Issue (11) : 1613-1624.

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Prog Chem ›› 2023, Vol. 35 ›› Issue (11) : 1613-1624. DOI: 10.7536/PC230304
Review

Advanced Design of Block Copolymers for Nanolithography

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Abstract

Directed self-assembly (DSA) of block copolymer (BCP) has been identified as the potential strategy for the next-generation semiconductor manufacturing. The typical representative of the first generation (G1) of block copolymer for nanolithography is polystyrene-block-polymethylmethacrylate (PS-b-PMMA). DSA of PS-b-PMMA enables limited half pitch (0.5L0) of 11 nm due to the low Flory-Huggins interaction parameter (χ). The second generation (G2) of BCP is developed with the feature of high χ. Solvent anneal or top-coat is employed for the G2 BCP to form the perpendicular lamellae orientation. Towards industry friendly thermal anneal, high χ BCP with equal surface energy (γ) is reported as the third generation (G3) BCP. Recently, based on Materials Genome Initiative (MGI) concept, optimized design of block copolymers with covarying properties (G4) for nanolithography is presented to meet specific application criteria. G4 BCP achieves not only high χ and equal γ, but also high throughput synthesis, 4~10 nm half pitch patterns, and controlled segregation strength. This review focuses on the advanced design of G3 and G4 BCP for nanolithography. Moreover, the challenges and opportunities are discussed for the further development of DSA of BCP.

Contents

1 Introduction

2 Highχblock copolymers with equalγ(G3)

2.1 A-b-B block copolymer

2.2 A-b-(B-r-C)block copolymer

2.3(A-r-B)-b-C block copolymer

2.4 A-b-B-b-C block copolymer

3 Block copolymers with covarying properties(G4)

4 Conclusion and outlook

Key words

block copolymer / directed self-assembly / nanolithography / Flory-Huggins interaction parameter / surface energy

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Chen Leilei , Tao Yongxin , Hu Xin , et al . Advanced Design of Block Copolymers for Nanolithography[J]. Progress in Chemistry. 2023, 35(11): 1613-1624 https://doi.org/10.7536/PC230304

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