Simulation research on grating interferometric displacement measurement technology for MOEMS seismic sensors

HongYu XIE, ZhongXing WANG, Chao LU, Wei XIN, DongRong ZHAO, ShengRu ZHOU, WenTao CUI, LuLu ZHANG

Prog Geophy ›› 2025, Vol. 40 ›› Issue (5) : 2301-2315.

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Prog Geophy ›› 2025, Vol. 40 ›› Issue (5) : 2301-2315. DOI: 10.6038/pg2025JJ0181

Simulation research on grating interferometric displacement measurement technology for MOEMS seismic sensors

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Abstract

Conventional geophones face challenges such as insufficient sensitivity and poor low-frequency response in deep seismic exploration. Integrated grating interferometry, with its high displacement resolution, shows great potential in optical interferometric geophones. This study investigates the application of integrated grating interferometry in optical interferometric geophones through the following steps: First, a mathematical model for displacement detection based on grating interferometry is established using scalar diffraction theory. Next, the influence of key parameters—including light source wavelength, grating period, duty cycle, and tilt angle—on the relationship between interference fringe intensity and displacement is systematically analyzed. Finally, through the analysis of simulation results, quantitative references were provided for the optical path parameter design of the MOEMS seismic sensor. Based on the parameter design, estimated values for the key performance parameters of the MOEMS seismic sensor were derived. The results show that the displacement-to-voltage conversion sensitivity Sd can reach 2×108 V/m, and the dynamic range Dr can achieve 140 dB.

Key words

Seismic sensor / Integrated grating interferometry / Micro-displacement measurement / MOEMS / Simulation analysis

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HongYu XIE , ZhongXing WANG , Chao LU , et al . Simulation research on grating interferometric displacement measurement technology for MOEMS seismic sensors[J]. Progress in Geophysics. 2025, 40(5): 2301-2315 https://doi.org/10.6038/pg2025JJ0181

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